Ultra-High Vacuum Science and Thin Film Deposition

SPONSORED BY IEEE AND KURT J. LESKER COMPANY

Step inside the world of ultra-high vacuum systems, thin film deposition, and advanced materials research during this free, hands-on workshop hosted by George Mason University’s Nanofabrication Facility (NFF) in partnership with Kurt J. Lesker Company’s Lesker U training program.

Designed for researchers, students, engineers, and technical professionals, the workshop will explore the science and technologies behind physical vapor deposition, sputtering systems, vacuum characterization, and thin film growth models, combining foundational concepts with real-world applications used throughout advanced manufacturing and nanofabrication.

Attendees will hear from industry experts, tour the NFF laboratories, and get an inside look at the systems and processes driving next-generation materials research.

Morning Session
9:00 AM – 12:00 PM
Introduction to Vacuum Science and System Design

Resources for Physical Vapor Deposition
Thermal and Electron Beam Evaporation
Magnetron Sputtering
DCMS, Pulsed DC, RF, and HiPIMS

Afternoon Session
12:30 PM – 4:00 PM
NFF Lab Tour and Special Considerations for Ultra-High Vacuum

Characterizing Vacuum Systems
Troubleshooting Sputtering Processes
Introduction to Atomic Layer Deposition
Thin Film Models and Structure Zone Diagrams